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Full integration of highly reliable phase change memory with advanced ring type bottom electrode contact File

Shin, J. M. , Song, Y. J. , Kang, D. W. , Jeong, Changwook , Ryoo, K. C. , Park, J. H. , Oh, J. H. , Kong, J. H. , Jae , Park , et al

Article Issue Date2007-05 View71
Ring contact electrode process for high density phase change random access memory File

Ryoo, Kyung-Chang , Song, Yoon Jong , Shin, Jae-Min , Park, Sang-Su , Lim, Dong-Won , Kim, Jae-Hyun , Park, Woon-Ik , Sim, Ku-Ri , Jeong, Ji-Hyun , Kang, Dae-Hwan , et al

Article Issue Date2007-04 View85
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