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Showing results 1 to 8 of 8

Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects File

Lee, Hyun-Jung , Hong, Tae Eun , Kim, Soo-Hyun

Article Issue Date2016-11 View4
Atomic layer deposition of Ru thin film using N-2/H-2 plasma as a reactant File

Hong, Tae Eun , Mun, Ki-Yeung , Choi, Sang-Kyung , Park, Ji-Yoon , Kim, Soo-Hyun , Cheon, Taehoon , Kim, Woo Kyoung , Lim, Byoung-Yong , Kim, Sunjung

Article Issue Date2012-07 View1
Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant File

Jung, Jae-Hun , Lee, Seung-Joon , Lee, Hyun-Jung , Lee, Min Young , Cheon, Taehoon , Bae, So Ik , Saito, Masayuki , Suzuki, Kazuharu , Nabeya, Shunichi , Lee, Jeongyeop , et al

Article Issue Date2015-11 View3
Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization File

Yeo, Seungmin , Choi, Sang-Hyeok , Park, Ji-Yoon , Kim, Soo-Hyun , Cheon, Taehoon , Lim, Byoung-Yong , Kim, Sunjung

Article Issue Date2013-11 View4
Edge-selective decoration with ruthenium at graphitic nanoplatelets for efficient hydrogen production at universal pH File

Yang, Yejin , Kim, Jeongwon , Kim, Changmin , Seong, Arim , Kwon, Ohhun , Lee, Jeong Hyeon , Kristanto, Imanuel , Zhang, Linjuan , Zhou, Jing , Wang, Jian-Qiang , et al

Article Issue Date2020-10 View5
Hydrogen production by the catalytic decomposition of ammonia over a Ru/SiCeOx catalyst: The synergistic effect of Si addition File

Kim, Eun-Jeong , Kim, Young Woo , Kim, Tae Wan , Suh, Young-Woong , Shin, Chae-Ho , An, Kwangjin , Min, Hyung-Ki

Article Issue Date2023-12 View5
Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes File

Lee, Jae Hwan , Park, Bo-Eun , Thompson, David , Choe, Myeonggi , Lee, Zonghoon , Oh, Il-Kwon , Kim, Woo-Hee , Kim, Hyungjun

Article Issue Date2020-05 View9
Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen File

Yeo, Seungmin , Park, Ji-Yoon , Lee, Seung-Joon , Lee, Do-Joong , Seo, Jong Hyun , Kim, Soo-Hyun

Article Issue Date2015-04 View5
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