Scholarworks@UNIST

UNIST Library
Search

Browsing by Keyword : METALLIZATION

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
Sort by: In order: Results/Page Etal:

Showing results 1 to 10 of 10

A bilayer diffusion barrier of ALD-Ru/ALD-TaCN for direct plating of Cu File

Kim, Soo-Hyun , Kim, Hyun Tae , Yim, Sung-Soo , Lee, Do-Joong , Kim, Ki-Su , Kim, Hyun-Mi , Kim, Ki-Bum , Sohn, Hyunchul

Article Issue Date2008-06 View4
Characterization of a Ru-based ternary-oxide thin film for a diffusion barrier File

Hong, Tae Eun , Jeong, E. D. , Byeon, M. R. , Kang, Y. B. , Yang, Ho-Soon , Kim, Soo-Hyun

Article Issue Date2012-09 View4
Controlled formation of MoSe2 by MoNx thin film as a diffusion barrier against Se during selenization annealing for CIGS solar cell File

Jeon, Chan-Wook , Cheon, Taehoon , Kim, Hangil , Kwon, Min-Su , Kim, Soo-Hyun

Article Issue Date2015-09 View5
Improvement of the Diffusion Barrier Performance of Ru by Incorporating a WNx Thin Film for Direct-Plateable Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Jeon, Chan-Wook , Sohn, Hyunchul , Kim, Soo-Hyun

Article Issue Date2009-04 View4
Influence of additives upon Cu thin film growth on atomic-layer-deposited Ru layer and trench-filling by direct electrodeposition File

Im, Byoungyong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2017-08 View6
Nucleation-controlled growth of Cu thin films electrodeposited directly on ALD Ru diffusion barrier in additive-free electrolyte for Cu interconnect File

Im, Byoungyong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2023-04 View9
Origin of Screen-Printed Metal Contact Losses in Crystalline Silicon Solar Cells File

Jeong, Myeong Sang , Lee, Sang Hee , Choi, Sungjin , Min, Kwan Hong , Lee, Jong Hoon , Kang, Min Gu , Jeong, Kyung Taek , Kwak, Sang Kyu , Song, Hee-eun , Lee, Tae Kyung , et al

Article Issue Date2023-11 View5
Ru/WNx Bilayers as Diffusion Barriers for Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Choi, Sang-Hyeok , Kim, Soo-Hyun

Article Issue Date2011-05 View3
Synthesis of ZnO nanorods by the thermal reduction process of a mixture of ZnO and Al powder File

Nam, Kyung-Don , Kwak, Sang Kyu , Lee, Jong-Min

Article Issue Date2011-12 View5
The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect File

Mun, Ki-Yeung , Hong, Tae Eun , Cheon, Taehoon , Jang, Yujin , Lim, Byoung-Yong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2014-07 View3
1
STATISTICS
Total View :289,068
Total Download :12,805
Today View :1,421

RSS 1.0 RSS 2.0

CONTACT US

UNIST | Library

Tel : 052-217-1404 / Email : scholarworks@unist.ac.kr

Copyright (c) 2023 by UNIST LIBRARY. All rights reserved.

ScholarWorks@UNIST was established as an OAK Project for the National Library of Korea.