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Showing results 1 to 11 of 11

A bilayer diffusion barrier of ALD-Ru/ALD-TaCN for direct plating of Cu File

Kim, Soo-Hyun , Kim, Hyun Tae , Yim, Sung-Soo , Lee, Do-Joong , Kim, Ki-Su , Kim, Hyun-Mi , Kim, Ki-Bum , Sohn, Hyunchul

Article Issue Date2008-06 View137
Characterization of a Ru-based ternary-oxide thin film for a diffusion barrier File

Hong, Tae Eun , Jeong, E. D. , Byeon, M. R. , Kang, Y. B. , Yang, Ho-Soon , Kim, Soo-Hyun

Article Issue Date2012-09 View99
Controlled formation of MoSe2 by MoNx thin film as a diffusion barrier against Se during selenization annealing for CIGS solar cell File

Jeon, Chan-Wook , Cheon, Taehoon , Kim, Hangil , Kwon, Min-Su , Kim, Soo-Hyun

Article Issue Date2015-09 View136
Improvement of the Diffusion Barrier Performance of Ru by Incorporating a WNx Thin Film for Direct-Plateable Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Jeon, Chan-Wook , Sohn, Hyunchul , Kim, Soo-Hyun

Article Issue Date2009-04 View111
Influence of additives upon Cu thin film growth on atomic-layer-deposited Ru layer and trench-filling by direct electrodeposition File

Im, Byoungyong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2017-08 View107
Nucleation-controlled growth of Cu thin films electrodeposited directly on ALD Ru diffusion barrier in additive-free electrolyte for Cu interconnect File

Im, Byoungyong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2023-04 View126
Origin of Screen-Printed Metal Contact Losses in Crystalline Silicon Solar Cells File

Jeong, Myeong Sang , Lee, Sang Hee , Choi, Sungjin , Min, Kwan Hong , Lee, Jong Hoon , Kang, Min Gu , Jeong, Kyung Taek , Kwak, Sang Kyu , Song, Hee-eun , Lee, Tae Kyung , et al

Article Issue Date2023-11 View108
Potentiostatic electrodeposition of Cu thin films directly on ALD Ru diffusion barrier and trench-filling for Cu interconnect File

Im, Byoungyong , Kim, Sunjung , Kim, Soo-Hyun , Park, Kwangsuk

Article Issue Date2026-03 View15
Ru/WNx Bilayers as Diffusion Barriers for Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Choi, Sang-Hyeok , Kim, Soo-Hyun

Article Issue Date2011-05 View101
Synthesis of ZnO nanorods by the thermal reduction process of a mixture of ZnO and Al powder File

Nam, Kyung-Don , Kwak, Sang Kyu , Lee, Jong-Min

Article Issue Date2011-12 View142
The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect File

Mun, Ki-Yeung , Hong, Tae Eun , Cheon, Taehoon , Jang, Yujin , Lim, Byoung-Yong , Kim, Sunjung , Kim, Soo-Hyun

Article Issue Date2014-07 View84
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