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Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen File

Park, Na-Yeon , Kim, Minsu , Kim, Youn-Hye , Ramesh, Rahul , Nandi, Dip K. , Tsugawa, Tomohiro , Shigetomi, Toshiyuki , Suzuki, Kazuharu , Harada, Ryosuke , Kim, Miso , et al

Article Issue Date2022-02 View189

Atomic Layer Deposition of Ru for Replacing Cu-Interconnects File

Kotsugi, Yohei , Han, Seung-Min , Kim, Youn-Hye , Cheon, Taehoon , Nandi, Dip K. , Ramesh, Rahul , Yu, Neung-Kyung , Son, Kirak , Tsugawa, Tomohiro , Ohtake, Shigeyuki , et al

Article Issue Date2021-07 View174

Atomic Layer Deposition Route to Scalable, Electronic-Grade van der Waals Te Thin Films File

Kim, Changhwan , Hur, Namwook , Yang, Jiho , Oh, Saeyoung , Yeo, Jeongin , Jeong, Hu Young , Shong, Bonggeun , Suh, Joonki

Article Issue Date2023-08 View247

Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches File

Nguyen, Chi Thang , Gu, Bonwook , Cheon, Taehoon , Park, Jeongwoo , Khan, Mohammad Rizwan , Kim, Soo-Hyun , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2021-06 View142

Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects File

Nguyen, Chi Thang , Kim, Miso , Kim, Youn-Hye , Cheon, Taehoon , Trinh, Ngoc Le , Kim, Sehee , Kim, Soo-Hyun , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2025-12 View28

Enhanced functional properties of ABC-type atomic layer deposited Ru thin films for advanced Cu alternative nanoscale interconnects File File

Kim, Jeongha , Mohapatra, Debananda , Son, Yeseul , Jang, Jae Min , Kim, Sang Bok , Hong, Tae Eun , Cheon, Taehoon , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2026-03 View3

Highly conductive and flexible fiber for textile electronics obtained by extremely low-temperature atomic layer deposition of Pt File File

Lee, Jaehong , Yoon, Jaehong , Kim, Hyun Gu , Kang, Subin , Oh, Woo-Suk , Algadi, Hassan , Al-Sayari, Saleh , Shong, Bonggeun , Kim, Soo-Hyun , Kim, Hyungjun , et al

Article Issue Date2016-11 View109

Low-Temperature Atomic Layer Deposition of Highly Conformal Tin Nitride Thin Films for Energy Storage Devices File

Ansari, Mohd Zahid , Nandi, Dip K. , Janicek, Petr , Ansari, Sajid Ali , Ramesh, Rahul , Cheon, Taehoon , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2019-11 View123

Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications File File

Yeo, Seungmin , Nandi, Dip K. , Rahul, R. , Kim, Tae Hyun , Shong, Bonggeun , Jang, Yujin , Bae, Jong-Seong , Han, Jeong Woo , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2018-11 View171

Low-temperature growth of crystalline Tin(II) monosulfide thin films by atomic layer deposition using a liquid divalent tin precursor File File

Ansari, Mohd Zahid , Janicek, Petr , Nandi, Dip K. , Slang, Stanislav , Bouska, Marek , Oh, Hongjun , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2021-11 View115

Reaction Mechanism of Pt Atomic Layer Deposition on Various Textile Surfaces File

Oh, Il-Kwon , Park, Jong Seo , Khan, Mohammad Rizwan , Kim, Kangsik , Lee, Zonghoon , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2019-11 View101

Small and Simple Molecular Structure Based Thermally Stable Ruthenium Precursor in Advancing Ruthenium ALD Process for Scaled Interconnect Metallization File File

Nakatsubo, Hideaki , Mohapatra, Debananda , Lee, Eun-soo , Kim, Jeongha , Cho, Iaan , Iseki, Masato , Shigetomi, Toshiyuki , Harada, Ryosuke , Na, Sang-woong , Cheon, Taehoon , et al

Article Issue Date2026-02 View23

Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)(6) and NH3 and Its Diffusion Barrier Application File

Tae Hyun Kim , Nandi, Dip K. , Ramesh, Rahul , Han, Seung-Min , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2019-10 View114

Surface Energy Change of Atomic-Scale Metal Oxide Thin Films by Phase Transformation File

Oh, Il-Kwon , Zeng, Li , Kim, Jae-Eun , Park, Jong-Seo , Kim, Kangsik , Lee, Hyunsoo , Seo, Seunggi , Khan, Mohammad Rizwan , Kim, Sangmo , Park, Chung Wung , et al

Article Issue Date2020-01 View93

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