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Comparative analysis of CeO₂ thin films deposited by plasma-enhanced and thermal atomic layer deposition using a novel liquid Ce precursor

Seo, Yewon , Kim, Sang Bok , Moon, Sola , Yoon, Tae-Sik , Kim, Soo-Hyun

Conference Paper Issue Date2025-12-11 View29
Comparative Growth and Functional Integration of CeO2 Films via Plasma-Enhanced and Thermal ALD Using a Tailored Cerium Precursor for Artificial Synaptic Devices File File

Seo, Yewon , Mohapatra, Debananda , Moon, Sola , Bae, Jong-Seong , Cheon, Taehoon , Yoon, Tae-Sik , Kim, Soo-Hyun

Article Issue Date2026-04 View1
Comparative study of CeO₂ thin films prepared by plasma-enhanced and thermal atomic layer deposition using a new liquid Ce precursor

Seo, Yewon , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-06-24 View5
Comparative Study on the CeO2 Thin Film Prepared by Plasma-Enhanced and Thermal Atomic Layer Deposition with a New Liquid Ce Precursor for the Switching Material of the Artificial Synaptic Devices File

Seo, Yewon

Thesis Issue Date2026-02 View18
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