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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)TypeView
2004-11Effect of substrate temperature on structure and intrinsic stress in vapor-deposited amorphous silicon carbide filmKim, Ju-Young; Lee, BW; Nam, HS; Kwon, DARTICLE542
2004Molecular dynamics analysis of structure and intrinsic stress in amorphous silicon carbide film with deposition process parametersKim, Ju-Young; Lee, BW; Nam, HS; Kwon, DARTICLE554
Showing results 1 to 2 of 2

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