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Browsing by Author : Kim, Yejun

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Growth of High-Quality InN Thin Films by Plasma-Enhanced ALD Using a Novel Indium Precursor and NH3 Plasma

Kim, Yejun , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2025-12-11 View19
Growth of High-Quality InN Thin Films by Plasma-Enhanced ALD Using a Novel Indium Precursor and NH3 Plasma

Kim, Yejun , 김상복 , Kim, Soo-Hyun

Conference Paper Issue Date2025-12-11 View5
Plasma-Enhanced Atomic Layer Deposition of High-Quality InN Thin Films Using a Liquid Heteroleptic In Precursor and NH3 Plasma File

Kim, Yejun

Thesis Issue Date2026-02 View0
Plasma-Enhanced Atomic Layer Deposition of High-Quality InN Thin Films Using a Novel In Precursor and NH3 Plasma

Kim, Yejun , Kweon, Minjeong , Park, Chaehyun , Kim, Soo-Hyun

Conference Paper Issue Date2025-06-24 View12
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