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Role of Inter-Layer Dielectric on the Electrical and Heat Dissipation Characteristics in the Heterogeneous 3D Sequential CFETs with Ge p-FETs on Si n-FETs File

Kim, Seong Kwang , Lim, Hyeong-Rak , Shim, Joonsup , Baek, Woojin , Kim, Seongho , Park, Youngkeun , Jeong, Jaejoong , Lim, Jinha , Kim, Joon Pyo , Jeong, Jaeyong , et al

Conference Paper Issue Date2023-12-09 View0
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