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Highly manufacturable high density phase change memory of 64Mb and beyond

Ahn, S.J. , Song, Y.J. , Jeong, Changwook , Shin, J.M. , Fai, Y. , Hwang, Y.N. , Lee, S.H. , Ryoo, K.C. , Lee, S.Y. , Park, J.H. , et al

Conference Paper Issue Date2004-12-13 View65
Process technologies for the integration of high density phase change RAM File

Jeong, G. T. , Hwang, Y. N. , Lee, S. H. , Lee, S. Y. , Ryoo, K. C. , Park, J. H. , Song, Y. J. , Ahn, S. J. , Jeong, Changwook , Kim, Y. T. , et al

Conference Paper Issue Date2005-05-09 View47
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