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Enhancing Electrical and Interfacial Properties of BeO/4H-SiC Structures with SiO2 Interlayer File File

Han, Sangoh , Jung, Dohwan , Bae, Jonghyun , Chae, Juyoung , Bong, Haekyun , Sultane, Prakash R. , Bielawski, Christopher W. , Oh, Jungwoo

Article Issue Date2025-10 View38
High-quality BeO films fabricated using discrete feeding plasma-enhanced atomic layer deposition File

Bae, Jonghyun , Chae, Juyoung , Jang, Yoonseo , Jung, Dohwan , Han, Sangoh , Sultane, Prakash R. , Bielawski, Christopher W. , Oh, Jungwoo

Article Issue Date2025-08 View95
Low-temperature thermal atomic layer deposition of beryllium oxide films using discrete feeding methods File File

Chae, Juyoung , Bae, Jonghyun , Jang, Yoonseo , Jung, Dohwan , Han, Sangoh , Sultane, Prakash R. , Bielawski, Christopher W. , Oh, Jungwoo

Article Issue Date2025-04 View32
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