Scholarworks@UNIST

UNIST Library
Search

Browsing by Author : Park, Young-Bae

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
Sort by: In order: Results/Page Etal:

Showing results 3 to 5 of 5

Interfacial adhesion energies of Ru-Mn direct plateable diffusion barriers prepared by atomic layer deposition for advanced Cu interconnects File

Son, Kirak , Kim, Youn-Hye , Kim, Soo-Hyun , Park, Young-Bae

Article Issue Date2021-08 View17
Interfacial Adhesion Energy of Ru-AlO Thin Film Deposited by Atomic Layer Deposition between Cu and SiO2: Effect of the Composition of Ru-AlO Thin Film File

Kim, Jeong-Kyu , Cheon, Tae-Hoon , Kim, Soo-Hyun , Park, Young-Bae

Article Issue Date2012-05 View18
후속열처리 및 고온고습 조건에 따른 Cu 배선 확산 방지층 적용을 위한ALD RuAlO 박막의 계면접착에너지에 관한 연구 File

Lee, Hyeonchul , Jeong, Minsu , Bae, Byung-Hyun , Cheon, Taehun , Kim, Soo-Hyun , Park, Young-Bae

Article Issue Date2016-06 View15
1

RSS 1.0 RSS 2.0

CONTACT US

UNIST | Library

Tel : 052-217-1404 / Email : scholarworks@unist.ac.kr

Copyright (c) 2023 by UNIST LIBRARY. All rights reserved.

ScholarWorks@UNIST was established as an OAK Project for the National Library of Korea.