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Process technologies for the integration of high density phase change RAM File

Jeong, G. T. , Hwang, Y. N. , Lee, S. H. , Lee, S. Y. , Ryoo, K. C. , Park, J. H. , Song, Y. J. , Ahn, S. J. , Jeong, Changwook , Kim, Y. T. , et al

Conference Paper Issue Date2005-05-09 View17
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