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남궁선

Namgung, Seon
Quantum Device Lab.
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Defining the zerogap: cracking along the photolithographically defined Au-Cu-Au lines with sub-nanometer precision

Author(s)
Kim, SunghwanDas, BamadevJi, Kang HyeonMoghaddam, Mahsa HaddadiChen, ChengCha, JongjinNamgung, SeonLee, DukhyungKim, Dai-Sik
Issued Date
2023-04
DOI
10.1515/nanoph-2022-0680
URI
https://scholarworks.unist.ac.kr/handle/201301/65794
Citation
NANOPHOTONICS, v.12, no.8, pp.1481 - 1489
Abstract
Cracks are formed along the photolithographically pre-determined lines with extremely high yield and repeatability, when Cu clusters are introduced between planarized Au thin films sequentially deposited on a PET substrate. These clusters act as nanometer-sized spacers preventing the formation of contiguous metallic bond between the adjacent Au layers which will render prepatterned-cracking impossible. While the effective gap width is initially zero in the optical sense from microwaves all the way to the visible, outer-bending the PET substrate allows the gap width tuning into the 100 nm range, with the stability and controllability in the ranges of 100 s and Angstrom-scale, respectively. It is anticipated that our wafer-scale prepatterned crack technology with an unprecedented mixture of macroscopic length and Angstrom-scale controllability will open-up many applications in optoelectronics, quantum photonics and photocatalysis.
Publisher
WALTER DE GRUYTER GMBH
ISSN
2192-8606
Keyword (Author)
metal crackphotolithographyquantum conductancesub-nanometerzerogap fabrication
Keyword
PHASE-DIAGRAMSTHIN-FILMSAG-AUCONDUCTANCENI

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