BROWSE

Related Researcher

Author

Madou, Mark
BIO-MEMS Lab
Research Interests
  • Medical Diagnostics

ITEM VIEW & DOWNLOAD

A novel method for the fabrication of high-aspect ratio C-MEMS structures

Cited 101 times inthomson ciCited 110 times inthomson ci
Title
A novel method for the fabrication of high-aspect ratio C-MEMS structures
Author
Wang, CLJia, GYTaherabadi, LHMadou, Mark
Keywords
Complex microelectromechanical systems (C-MEMS); High-aspect ratio; Li intercalation; Microbattery; Photoresist; Pyrolysis; Suspended structure
Issue Date
200504
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.14, no.2, pp.348 - 358
Abstract
A novel fabrication process was developed to create high aspect ratio (>10 : 1) carbon posts, all-carbon suspended bridges and wires, self-organized bunches of carbon posts, and carbon plates supported by carbon beams. The structures are all made from a two-step pyrolysis process with SU-8 photoresist as the starting material. In this paper we describe the fabrication of these various new C-MEMS structures and detail an important application of the high aspect ratio carbon posts arrays. The carbon post arrays can be reversible charged/discharged with Li ions, an application that may greatly impact the application of C-MEMS in three-dimensional microbatteries. Complex suspended C-MEMS structures, such as wires, plates, ribbons, and self-organized bunches of posts, were built. Methods to accurately and repeatedly fabricate all the above 3-D C-MEMS structures are given.
URI
Go to Link
DOI
http://dx.doi.org/10.1109/JMEMS.2004.839312
ISSN
1057-7157
Appears in Collections:
SLS_Journal Papers

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show full item record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU