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Madou, Mark
BIO-MEMS Lab
Research Interests
  • Medical Diagnostics

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C-MEMS for the manufacture of 3D microbatteries

Cited 103 times inthomson ciCited 116 times inthomson ci
Title
C-MEMS for the manufacture of 3D microbatteries
Author
Wang, CLTaherabadi, LJia, GYMadou, MarkYeh, YTDunn, B
Keywords
ION RECHARGEABLE BATTERIES; PHOTORESIST; CARBON
Issue Date
2004
Publisher
ELECTROCHEMICAL SOC INC
Citation
ELECTROCHEMICAL AND SOLID STATE LETTERS, v.7, no.11, pp.A435 - A438
Abstract
We have demonstrated that carbon-microelectromechanical systems (C-MEMS), in which patterned photoresist is pyrolyzed in inert environment at high temperature, constitutes a powerful approach to building 3D carbon microelectrode arrays for 3D microbattery applications. High aspect ratio carbon posts (>10:1) are achieved by pyrolyzing SU-8 negative photoresist in a simple one step process. Lithium can be reversibly charged and discharged into these C-MEMS electrodes. Because of the additional volume of the posts, higher capacities are achieved with the 3D array electrodes as compared to unpatterned carbon films with the same projected electrode area. These novel electrode arrays represent one of the critical components for 3D batteries, which may be interconnected with C-MEMS leads to enable smart power management schemes.
URI
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DOI
http://dx.doi.org/10.1149/1.1798151
ISSN
1099-0062
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