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- Chung, Il-Sug
- Nano-Optoelectronics Lab.
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Intracavity-contacted resonant cavity enhanced photodetectors based on VCSEL structure
- Author(s)
- Chung, Il-Sug, Choi, Jin-Kyung, Chang, Ki-Soo, Alameh, Kamal, Lee, Yong Tak
- Issued Date
- 2006-09-05
- Citation
- Optoelectronic Materials and Devices, v.6352 I
- Abstract
- Intracavity-contacted resonant cavity enhanced photodetectors (IC RCEPDs) have been fabricated for monolithic integration with IC VCSELs. A low parasitic capacitance of 0.39 pF and an extrinsic 3-dB bandwidth of 9 GHz are demonstrated by using coplanar metal contacts. Optimization issues on device and epi designs are discussed. The largest frequency saturation photocurrent below which the extrinsic 3-dB bandwidth exceeds 6.5 GHz is 4.2 μA.
- Publisher
- Optoelectronic Materials and Devices
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