Based on past and current research experience, my long term research goal is to establish and develop “Multi-Physics based Micro/Meso-scale Manufacturing (MP-M2) Processes and Systems.” In order for this goal to be achieved, it will be necessary to conduct fundamental research into the MP-M2 process as well as to develop a design technique for components and an overall system. In this system, various mechanical micro-machining processes will be performed to produce micro-features, such as micro-molds, bio-sensors, and micro-patterns for portable fuel cells, using diverse materials