Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
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- Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
- Jeong, Hu Young; Lee, Jeong Yong; Choi, Sung-Yool; Kim, Jeong Won
- Al-metal; Analytical transmission electron microscopy; Direct observation; Energy-filtering transmission electron microscopies; In-situ; Nano scale; Oxygen ions; Resistive switching; Resistive switching behaviors; Titanium oxide layer; Titanium oxide thin films
- Issue Date
- AMER INST PHYSICS
- APPLIED PHYSICS LETTERS, v.95, no.16, pp. -
- We report a direct observation of the microscopic origin of the bipolar resistive switching behavior in nanoscale titanium oxide films. Through a high-resolution transmission electron microscopy, an analytical transmission electron microscopy technique using energy-filtering transmission electron microscopy, and an in situ x-ray photoelectron spectroscopy, we demonstrated that the oxygen ions piled up at the top interface by an oxidation-reduction between the titanium oxide layer and the top Al metal electrode. We also found that the drift of oxygen ions during the on/off switching induced the bipolar resistive switching in the titanium oxide thin films.
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