Introduction to UNIST FAB Infrastructure and Open Service for Quantum Integrated Photonic Devices: Equipment and Process Technology

Abstract

As an initiative for constructing a nationwide quantum FAB infrastructure, the UNIST-POSTECH consortium has been awarded a three-year government project in 2023, intended to equip the UNST FAB with the cutting-edge fabrication apparatuses and process technologies for quantum integrated photonic devices. In this talk, an overview of the project will be given including its main objective, fabrication apparatuses to be installed and associated process technologies to be developed, and up-to-date progress reports. Additionally, the detailed time table to kick off providing the open service for utilizing the installed apparatuses and developed processes to the domestic researchers working on quantum technology will also be presented.