The 38th International Conference on Micro Electro Mechanical Systems
Abstract
We introduce a novel mesh-shaped electrochemical (EC) filter that enhances the reliability of electrochemical sensors, which are either based on catalytic reaction or redox cycling, by electrochemically removing interfering species in situ while minimally affecting the detection of target analytes. The geometries of micrometer-sized mesh-shaped filter electrodes, fabricated using wafer-scale MEMS processes, were optimized for efficient filtering through simulation and experiments. The EC filter-integrated electrochemical sensors successfully demonstrated the detection of glucose and dopamine with high reliability, even in the presence of interfering species at varying concentrations.