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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Jang, Ji-Hyun | - |
| dc.contributor.author | Jeon, Doojin | - |
| dc.date.accessioned | 2025-04-04T13:50:02Z | - |
| dc.date.available | 2025-04-04T13:50:02Z | - |
| dc.date.issued | 2025-02 | - |
| dc.description.degree | Master | - |
| dc.description | Graduate School of Semiconductor Materials and Devices Engineering | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/86506 | - |
| dc.identifier.uri | http://unist.dcollection.net/common/orgView/200000866034 | - |
| dc.language | ENG | - |
| dc.publisher | Ulsan National Institute of Science and Technology | - |
| dc.rights.embargoReleaseDate | 9999-12-31 | - |
| dc.rights.embargoReleaseTerms | 9999-12-31 | - |
| dc.subject | Photoresist | - |
| dc.subject | EUV | - |
| dc.subject | Semiconductor | - |
| dc.subject | Substrate | - |
| dc.title | Photoresist synthesis as the candidates for front & back-end semiconductor processes | - |
| dc.type | Thesis | - |
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