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- Kim, Soo-Hyun
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 9th International Symposium on Practical Surface Analysis (PSA-24) | - |
| dc.contributor.author | Park, Chaehyun | - |
| dc.contributor.author | Hong, Tae Eun | - |
| dc.contributor.author | Kim, Sang Bok | - |
| dc.contributor.author | Bae, Jong-Seong | - |
| dc.contributor.author | Kweon, Minjeong | - |
| dc.contributor.author | Kim, Soo-Hyun | - |
| dc.date.accessioned | 2025-01-06T11:05:06Z | - |
| dc.date.available | 2025-01-06T11:05:06Z | - |
| dc.date.created | 2025-01-03 | - |
| dc.date.issued | 2024-11-20 | - |
| dc.identifier.bibliographicCitation | 9th International Symposium on Practical Surface Analysis (PSA-24) | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/85619 | - |
| dc.publisher | PSA-24 | - |
| dc.title | Development of highly conductive NbCx thin films using PEALD for diffusion barrier applications in Cu and Ru interconnects | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2024-11-17 | - |
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