Coating of stretchable and chemically-stable metallic glass film for encapsulations

Abstract

Metallic glass has disordered structure that behave mechanically like solids but show catastrophic failure due to short range order structure, and they are generally produced by quenching. Recently, it is observed that the slower cooling rate provides the larger time available for atoms to rearrange structure before freezing in glassy state, leading to glass transition temperature and thermal stability. These glasses with enhanced glass transition temperature synthesized by controlled cooling rate make it useful for various technologies such as wear or oxidation protection material. However, mechanical behavior for metallic glass with extraordinary thermodynamic and kinetic stability has not been studied. In this research, we developed a ultrastable metallic glass thin film by physical vapor deposition process at ambient temperature. Mechanical properties are investigated using in-situ tensile testing and discuss thermal stability and fracture behavior dependent on composition of amorphous metal.