나노압입시험을 이용한 마이크로/나노 소재의 물성 특성화 및 응용

Abstract

Over the last two decades, nanoindentation has been widely used for evaluating mechanical properties of micro/nano materials. Principles to measure mechanical properties, basically hardness and elastic modulus, using nanoindentation were introduced and its applications are also presented. We explain and introduce main nanoindentation topics in detail as follows: contact depth determination to take surface roughness into account, indentation size effect models, quantitative evaluation of residual stress, materials phenomena such as yielding and phase transformation.