dc.citation.conferencePlace |
US |
- |
dc.citation.title |
The 21st International Conference on Solid-State Sensors, Actuators and Microsystems |
- |
dc.contributor.author |
Kwak, Jong-Hyun |
- |
dc.contributor.author |
Kundu, Pijus |
- |
dc.contributor.author |
Kim, Beomsang |
- |
dc.contributor.author |
KIm, Shin-Kwan |
- |
dc.contributor.author |
Kim, Gun-Ho |
- |
dc.contributor.author |
Shin, Heungjoo |
- |
dc.date.accessioned |
2024-01-31T21:39:57Z |
- |
dc.date.available |
2024-01-31T21:39:57Z |
- |
dc.date.created |
2021-12-30 |
- |
dc.date.issued |
2021-06-22 |
- |
dc.identifier.bibliographicCitation |
The 21st International Conference on Solid-State Sensors, Actuators and Microsystems |
- |
dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/77265 |
- |
dc.publisher |
Transducer Research Foundation |
- |
dc.title |
THROUGH SILICON VIA WITH A THIN CARBON CEILING FOR C-MEMS DEVICE PACKAGING |
- |
dc.type |
Conference Paper |
- |
dc.date.conferenceDate |
2021-06-20 |
- |