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Kim, Ju-Young
Robust Multifunctional Materials Lab
Research Interests
  • Flexible / stretchable devices, nano-mechanics, nanoporous metal, materials reliability

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Tensile properties and fatigue crack growth in LIGA nickel MEMS structures

Cited 16 times inthomson ciCited 19 times inthomson ci
Title
Tensile properties and fatigue crack growth in LIGA nickel MEMS structures
Author
Son, DKim, JJKim, Ju-YoungKwon, D
Keywords
Crack propagation rate; Cycles to failure; Fatigue; LIGA nickel; MEMS; Microtensile
Issue Date
2005-10
Publisher
ELSEVIER SCIENCE SA
Citation
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, v.406, no.1-2, pp.274 - 278
Abstract
The tensile and fatigue properties of LIGA (Lithographie, Galvanformung, Abformung) nickel microelectromechanical systems (MEMS) structures were evaluated using a microtensile/fatigue device. The feature size of the specimens was 10 μm. The stress-strain results obtained by microtensile tests showed comparatively brittle, and the variation in ultimate tensile strength was explained by the specimen geometry. Stress-cycle curves were also measured by tension-tension fatigue tests. The notch effect on fatigue was discussed in terms of notch-sensitivity factor. Crack propagation rates were measured by the unloading compliance method and the Paris parameter was obtained. The cycles to failure predicted from the crack propagation rate at various stress intensity factors were compared with the measured values.
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DOI
10.1016/j.msea.2005.06.044
ISSN
0921-5093
Appears in Collections:
MSE_Journal Papers
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