High-performance graphene top-gate FETs with air dielectric using foldable substrates

Abstract

Foldable electronic devices are experiencing rapid growth and expected to a prospective candidate for not only wearable electronics but also smaller electronics raising more functionality. In this paper, we fabricated a completely foldable substrate using unconventional manufacturing processes and intrinsically stretchable interconnect conductor. The foldable substrate composed of rigid and elastomeric materials allow the substrate to be deformed freely into pre-patterned architectures without any damages. We fabricate top-gate field effect-transistors with air dielectric by utilizing our foldable substrate, therefore, can achieve a clear interface between channel and gate dielectric. These graphene FETs show outstanding properties with the highest mobility of 300,000 cm2/V•s and strong reliability. These results represent high potential towards foldable and wearable electronics through the folding capability.