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DC Field Value Language
dc.contributor.assignee 울산과학기술원 -
dc.contributor.author 박이순 -
dc.contributor.author 윤형덕 -
dc.contributor.author 서덕민 -
dc.date.accessioned 2024-01-23T18:37:48Z -
dc.date.application 2018-02-27 -
dc.date.available 2024-01-23T18:37:48Z -
dc.date.registration 2020-03-11 -
dc.identifier.patentApplicationNumber 10-2018-0023912 -
dc.identifier.patentRegistrationNumber 10-2090286 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/70029 -
dc.title 포토레지스트 조성물, 이를 이용하는 포토리소그라피 공정, 및 이를 이용하여 제조된 화소 구획 층 -
dc.type Patent -
dc.publisher.country KO -
dc.type.iprs 특허 -

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