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Shin, Heungjoo
Micro/Nano Integrated Systems Lab.
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DC Field Value Language
dc.citation.conferencePlace KO -
dc.citation.conferencePlace 제주 -
dc.citation.title 제25회 한국 MEMS 학술대회 - Cho, Wootaek - Kwak, Jong-Hyun - Shin, Heungjoo - 2024-01-02T15:35:12Z - 2024-01-02T15:35:12Z - 2024-01-02 - 2023-03-22 -
dc.identifier.bibliographicCitation 제25회 한국 MEMS 학술대회 -
dc.identifier.uri -
dc.publisher 마이크로나노시스템학회 -
dc.title.alternative Suspended mesh heater-based thermal conductivity detector (TCD)-type gas sensor fabricated without an etching process -
dc.title 식각공정 없이 제작된 공중부유형 메쉬형 히터 기반 열전도도 검출기형 가스센서 -
dc.type Conference Paper - 2023-03-22 -


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