Fabrication of thin solid electrolytes containing a small volume of an Li3OCl-type antiperovskite phase by RF magnetron sputtering

Abstract

<jats:p>RF magnetron sputter deposition was performed using an Li<jats:sub>2</jats:sub>O + LiCl powder target. The resulting solid electrolyte films were found to contain a small volume fraction of an Li<jats:sub>3</jats:sub>OCl-type antiperovskite phase.</jats:p>