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최영빈

Tchoe, Youngbin
Neural Interfaces and Semiconductor Optoelectronics Lab
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Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene

Author(s)
Park, JunbeomGhosh, RameshSong, Minho S.Hwang, YunjaeTchoe, YoungbinSaroj, Rajendra KumarAli, AsadGuha, PuspenduKim, BosungKim, Sang-WooKim, MiyoungYi, Gyu-Chul
Issued Date
2022-12
DOI
10.1038/s41427-022-00386-4
URI
https://scholarworks.unist.ac.kr/handle/201301/64425
Citation
NPG ASIA MATERIALS, v.14, no.1, pp.40
Abstract
We report the fabrication of individually addressable, high-density, vertical zinc oxide (ZnO) nanotube pressure sensor arrays. High-sensitivity and flexible piezoelectric sensors were fabricated using dimension- and position-controlled, vertical, and free-standing ZnO nanotubes on a graphene substrate. Significant pressure/force responses were achieved from small devices composed of only single, 3 x 3, 5 x 5, and 250 x 250 ZnO nanotube arrays on graphene. An individually addressable pixel matrix was fabricated by arranging the top and bottom electrodes of the sensors in a crossbar configuration. We investigated the uniformity and robustness of pressure/force spatial mapping by considering the pixel size, the number of ZnO nanotubes in each pixel, and the lateral dimensions of individual ZnO nanotubes. A spatial resolution as high as 1058 dpi was achieved for a Schottky diode-based force/pressure sensor composed of ZnO nanotubes on a flexible substrate. Additionally, we confirmed the excellent flexibility and electrical robustness of the free-standing sensor arrays for high-resolution tactile imaging. We believe that this work opens important opportunities for 1D piezoelectric pressure/force sensor arrays with enormous applications in human-electronics interfaces, smart skin, and micro- and nanoelectromechanical systems.
Publisher
NATURE PORTFOLIO
ISSN
1884-4049
Keyword
LIGHT-EMISSIONTRANSPARENT

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