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DC Field | Value | Language |
---|---|---|
dc.citation.endPage | D106 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | D103 | - |
dc.citation.title | ELECTROCHEMICAL AND SOLID STATE LETTERS | - |
dc.citation.volume | 14 | - |
dc.contributor.author | Kim, Sunjung | - |
dc.contributor.author | Park, Kye-Sun | - |
dc.contributor.author | Kim, Soo-Hyun | - |
dc.date.accessioned | 2023-12-22T05:44:50Z | - |
dc.date.available | 2023-12-22T05:44:50Z | - |
dc.date.created | 2023-01-20 | - |
dc.date.issued | 2011-09 | - |
dc.description.abstract | Cu nanowires are directly patterned on W diffusion barrier surface by electrodeposition without using any template. Prior to Cu nanowire growth, a photoresist (PR) film coated over the W surface was mechanically patterned in a random manner with atomic force microscope (AFM) tip. Polycrystalline Cu nanowires in the shape of beaded string were electrochemically formed along line patterns on the W surface. This new approach of Cu nanowire synthesis suggests the feasibility of fabricating Cu interconnects for Si-based electronic devices by direct Cu nanowire patterning. (C) 2011 The Electrochemical Society. [DOI: 10.1149/2.024111esl] All rights reserved. | - |
dc.identifier.bibliographicCitation | ELECTROCHEMICAL AND SOLID STATE LETTERS, v.14, no.11, pp.D103 - D106 | - |
dc.identifier.doi | 10.1149/2.024111esl | - |
dc.identifier.issn | 1099-0062 | - |
dc.identifier.scopusid | 2-s2.0-80053471448 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/64152 | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1149/2.024111esl | - |
dc.identifier.wosid | 000295284800006 | - |
dc.language | 영어 | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.title | Electrochemical Formation of Cu Nanowires on W Surface Patterned by Atomic Force Microscope Tip | - |
dc.type | Article | - |
dc.description.isOpenAccess | FALSE | - |
dc.relation.journalWebOfScienceCategory | Electrochemistry; Materials Science, Multidisciplinary | - |
dc.relation.journalResearchArea | Electrochemistry; Materials Science | - |
dc.type.docType | Article | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | COPPER NANOWIRES | - |
dc.subject.keywordPlus | ELECTRODEPOSITION | - |
dc.subject.keywordPlus | ARRAYS | - |
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