Full metadata record
DC Field | Value | Language |
---|---|---|
dc.citation.startPage | 709018 | - |
dc.citation.title | JOURNAL OF NANOMATERIALS | - |
dc.citation.volume | 2014 | - |
dc.contributor.author | Kim, Junghwan | - |
dc.contributor.author | Meng, Jun | - |
dc.contributor.author | Lee, Donghoon | - |
dc.contributor.author | Yu, Meng | - |
dc.contributor.author | Yoo, Dukyean | - |
dc.contributor.author | Kang, Doo Won | - |
dc.contributor.author | Jo, Jungyol | - |
dc.date.accessioned | 2023-12-22T02:06:23Z | - |
dc.date.available | 2023-12-22T02:06:23Z | - |
dc.date.created | 2023-02-14 | - |
dc.date.issued | 2014-11 | - |
dc.description.abstract | ZnO thin-film transistor (TFT) grown by rf magnetron sputtering in Ar/O-2 atmosphere shows inferior turn-off characteristics compared to ZnO TFT grown by other methods. We thought that reactions between Zn and O-2 might produce defects responsible for the poor turn-off behavior. In order to solve this problem, we studied sputtering growth in Ar/CO2 atmosphere at 450 degrees C. During sputtering growth, we modulated substrate dc bias to control ion supply to the substrate. After growth ZnO was annealed in CO2 and O-2 gas. With these methods, our bottom-gate ZnO thin-film transistor showed 4.7 cm(2)/Vsec mobility, 4 x 10(6) on/off ratio, and -2V threshold voltage. | - |
dc.identifier.bibliographicCitation | JOURNAL OF NANOMATERIALS, v.2014, pp.709018 | - |
dc.identifier.doi | 10.1155/2014/709018 | - |
dc.identifier.issn | 1687-4110 | - |
dc.identifier.scopusid | 2-s2.0-84912086915 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/62128 | - |
dc.identifier.wosid | 000345388500001 | - |
dc.language | 영어 | - |
dc.publisher | HINDAWI LTD | - |
dc.title | ZnO Thin-Film Transistor Grown by rf Sputtering Using Carbon Dioxide and Substrate Bias Modulation | - |
dc.type | Article | - |
dc.description.isOpenAccess | TRUE | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology; Materials Science, Multidisciplinary | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics; Materials Science | - |
dc.type.docType | Article | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | ELECTRON-MOBILITY | - |
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