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DC Field | Value | Language |
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dc.citation.startPage | 132541 | - |
dc.citation.title | SENSORS AND ACTUATORS B-CHEMICAL | - |
dc.citation.volume | 371 | - |
dc.contributor.author | Cho, Wootaek | - |
dc.contributor.author | Kim, Taejung | - |
dc.contributor.author | Shin, Heungjoo | - |
dc.date.accessioned | 2023-12-21T13:36:25Z | - |
dc.date.available | 2023-12-21T13:36:25Z | - |
dc.date.created | 2022-10-21 | - |
dc.date.issued | 2022-11 | - |
dc.description.abstract | Thermal conductivity detectors (TCDs) are widely used to detect high-concentration gases or identify low-concentration gases in chromatography, owing to their fast response and recovery time for a wide range of gases. However, conventional TCD devices require large power consumption because of their relatively large sizes, which limits their applicability, specifically in IoT. In this study, an ultralow-power TCD was implemented for use as a gas sensor by manufacturing a suspended nanoheater via cost-effective wafer-level microfabrication technology (i.e., carbon-microelectromechanical systems). The aspect ratio of the nanoheater was optimized for a fixed minimum section area (width = 200–300 nm, thickness = 300–400 nm) using simulations and experiments. The small size, high aspect ratio (~ 270, corresponding to a nanoheater length of 80 µm), and suspended architecture allowed the nanoheater-based gas sensor to operate with high sensitivity and ultrafast response/recovery (time constant of less than 1 μs). This fast response enabled the sensor to operate with pulse-width modulation, reducing the power by 1/1000 (240 nW). The nanoheater-based gas sensor exhibited a linear gas response for various high-concentration gases (H2: 1–20 %, Ar: 1–100 %, He: 1–5 %). Moreover, the nanoheater was fabricated using only wafer-level microfabrication processes, ensuring cost-effective sensor manufacturing. Thus, nanoheater-based gas sensors are expected to be used in various portable IoT devices. | - |
dc.identifier.bibliographicCitation | SENSORS AND ACTUATORS B-CHEMICAL, v.371, pp.132541 | - |
dc.identifier.doi | 10.1016/j.snb.2022.132541 | - |
dc.identifier.issn | 0925-4005 | - |
dc.identifier.scopusid | 2-s2.0-85138525591 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/59788 | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0925400522011844 | - |
dc.identifier.wosid | 000864062800004 | - |
dc.language | 영어 | - |
dc.publisher | Elsevier BV | - |
dc.title | Thermal conductivity detector (TCD)-type gas sensor based on a batch-fabricated 1D nanoheater for ultra-low power consumption | - |
dc.type | Article | - |
dc.description.isOpenAccess | FALSE | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Analytical;Electrochemistry;Instruments & Instrumentation | - |
dc.relation.journalResearchArea | Chemistry;Electrochemistry;Instruments & Instrumentation | - |
dc.type.docType | Article | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordAuthor | Suspended 1D nanoheater | - |
dc.subject.keywordAuthor | Thermal conductivity detector | - |
dc.subject.keywordAuthor | Pulse -width modulation | - |
dc.subject.keywordAuthor | Batch fabrication | - |
dc.subject.keywordAuthor | Gas sensor | - |
dc.subject.keywordAuthor | Ultralow power | - |
dc.subject.keywordPlus | FUTURE | - |
dc.subject.keywordPlus | CARBON | - |
dc.subject.keywordPlus | HYDROGEN | - |
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