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Jeong, Changwook
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dc.citation.conferencePlace US -
dc.citation.conferencePlace Honolulu, HI, USA -
dc.citation.title 2006 Symposium on VLSI Technology -
dc.contributor.author Song, Y.J. -
dc.contributor.author Ryoo, K.C -
dc.contributor.author Hwang, Y.N. -
dc.contributor.author Jeong, Changwook -
dc.contributor.author Lim, D.W. -
dc.contributor.author Park, S.S. -
dc.contributor.author Kim, J.I. -
dc.contributor.author Kim, J.H. -
dc.contributor.author Lee, S.Y. -
dc.contributor.author Kong, J. -
dc.contributor.author Ahn, S. -
dc.contributor.author Lee, S.H. -
dc.contributor.author Park, J.H. -
dc.contributor.author Oh, J.H. -
dc.contributor.author Oh, Y.T. -
dc.contributor.author Kim, J.S. -
dc.contributor.author Shin, J. -
dc.contributor.author Park, J. -
dc.contributor.author Fai, Y. -
dc.contributor.author Koh, G. -
dc.contributor.author Jeong, G.T. -
dc.contributor.author Kim, R.H. -
dc.contributor.author Lim, H.S. -
dc.contributor.author Park, I.S. -
dc.contributor.author Jeong, H.S. -
dc.contributor.author Jeong, H. -
dc.contributor.author Kim, K. -
dc.date.accessioned 2023-12-20T05:08:44Z -
dc.date.available 2023-12-20T05:08:44Z -
dc.date.created 2022-04-11 -
dc.date.issued 2006-06-13 -
dc.description.abstract Advanced ring type technology and encapsulating scheme were developed to fabricate highly manufacturable and reliable 256Mb PRAM. Very uniform BEC area was prepared by the advanced ring type technology in which core dielectrics were optimized for cell contact CMP process. In addition, relatively high set resistance was stabilized from encapsulating Gb2Sb2Te 5 (GST) stack with blocking layers, thus giving rise to a wide sensing window. These advanced ring type and encapsulating technologies can provide great potentials of developing high density 512Mb PRAM and beyond. -
dc.identifier.bibliographicCitation 2006 Symposium on VLSI Technology -
dc.identifier.doi 10.1109/vlsit.2006.1705245 -
dc.identifier.scopusid 2-s2.0-39549112173 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/58533 -
dc.language 영어 -
dc.publisher IEEE -
dc.title Highly Reliable 256Mb PRAM with Advanced Ring Contact Technology and Novel Encapsulating Technology -
dc.type Conference Paper -
dc.date.conferenceDate 2006-06-13 -

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