File Download
There are no files associated with this item.
SFX Link
- Find it @ UNIST can give you direct access to the published full text of this article. (UNISTARs only)
- Jeong, Changwook
Views & Downloads
Detailed Information
Cited time in 
Cited time in 
Cited time in
Metadata Downloads
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.citation.endPage | 1399 | - |
| dc.citation.number | 10 | - |
| dc.citation.startPage | 1395 | - |
| dc.citation.title | 대한금속·재료학회지 | - |
| dc.citation.volume | 38 | - |
| dc.contributor.author | 정창욱 | - |
| dc.contributor.author | 이장식 | - |
| dc.contributor.author | 주승기 | - |
| dc.date.accessioned | 2023-12-22T12:06:37Z | - |
| dc.date.available | 2023-12-22T12:06:37Z | - |
| dc.date.created | 2022-04-06 | - |
| dc.date.issued | 2000-10 | - |
| dc.identifier.bibliographicCitation | 대한금속·재료학회지, v.38, no.10, pp.1395 - 1399 | - |
| dc.identifier.issn | 1738-8228 | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/58486 | - |
| dc.language | 영어 | - |
| dc.publisher | 대한금속·재료학회 | - |
| dc.title.alternative | Growth and Characterization of Aluminum Oxide (Al~ 2O~ 3) Thin Films by Plasma-Assisted Atomic Layer Controlled Deposition | - |
| dc.title | 플라즈마 도움 원자층 제어 증착법을 이용한 Al2O3 의 성장과 박막 특성의 연구 | - |
| dc.type | Article | - |
| dc.description.isOpenAccess | FALSE | - |
| dc.type.docType | Article | - |
| dc.description.journalRegisteredClass | kci | - |
| dc.description.journalRegisteredClass | kci_candi | - |
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.