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dc.citation.endPage 2187 -
dc.citation.number 10 -
dc.citation.startPage 2181 -
dc.citation.title BIOSENSORS & BIOELECTRONICS -
dc.citation.volume 20 -
dc.contributor.author Wang, CL -
dc.contributor.author Madou, Mark -
dc.date.accessioned 2023-12-22T10:37:21Z -
dc.date.available 2023-12-22T10:37:21Z -
dc.date.created 2014-08-29 -
dc.date.issued 2005-04 -
dc.description.abstract Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries. -
dc.identifier.bibliographicCitation BIOSENSORS & BIOELECTRONICS, v.20, no.10, pp.2181 - 2187 -
dc.identifier.doi 10.1016/j.bios.2004.09.034 -
dc.identifier.issn 0956-5663 -
dc.identifier.scopusid 2-s2.0-14644442288 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/5761 -
dc.identifier.url http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=14644442288 -
dc.identifier.wosid 000227845700042 -
dc.language 영어 -
dc.publisher ELSEVIER ADVANCED TECHNOLOGY -
dc.title From MEMS to NEMS with carbon -
dc.type Article -
dc.description.journalRegisteredClass scopus -
dc.subject.keywordAuthor carbon-microclectromechanical system (C-MEMS) -
dc.subject.keywordAuthor photoresist -
dc.subject.keywordAuthor pyrolysis -
dc.subject.keywordAuthor high-aspect ratio -
dc.subject.keywordAuthor suspended structure -
dc.subject.keywordPlus PYROLYZED PHOTORESIST -
dc.subject.keywordPlus GLASSY-CARBON -
dc.subject.keywordPlus C-MEMS -
dc.subject.keywordPlus FILMS -
dc.subject.keywordPlus FABRICATION -
dc.subject.keywordPlus REDUCTION -

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