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DC Field | Value | Language |
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dc.citation.endPage | J143 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | J136 | - |
dc.citation.title | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | - |
dc.citation.volume | 152 | - |
dc.contributor.author | Park, BY | - |
dc.contributor.author | Taherabadi, L | - |
dc.contributor.author | Wang, CL | - |
dc.contributor.author | Zoval, J | - |
dc.contributor.author | Madou, Mark | - |
dc.date.accessioned | 2023-12-22T10:39:55Z | - |
dc.date.available | 2023-12-22T10:39:55Z | - |
dc.date.created | 2014-08-29 | - |
dc.date.issued | 2005 | - |
dc.description.abstract | Recent advances in fabricating 3D micro- and nanostructures using carbon microelectromechanical systems, or C-MEMS, has opened up a wide variety of new and exciting applications. The development of 3D C-MEMS has been catapulted forward by the use of transparent, high-viscosity resists such as SU-8. The electrical characteristics and shrinkage of various thickness carbon films derived from SU-8 and AZ P4620 are quantified and discussed in the context of the decomposition and carbonization mechanisms of epoxy and phenolic resins. Measurements obtained reveal a thickness dependence of the resistivity at lower carbonization temperatures but not much dependence at 1000 degrees C. Possible explanations for this low-temperature thickness dependence are given. The electrical characteristics of carbon films obtained from both types of photoresists carbonized at 1000 degrees C are very similar to that of glassy carbon. Simulations have been carried out to demonstrate the importance of the carbon resistivity for C-MEMS devices when used in conductive media. A method for simple optimization and verification of C-MEMS device designs for use in conductive media is introduced. | - |
dc.identifier.bibliographicCitation | JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.152, no.12, pp.J136 - J143 | - |
dc.identifier.doi | 10.1149/1.2116707 | - |
dc.identifier.issn | 0013-4651 | - |
dc.identifier.scopusid | 2-s2.0-30344467260 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/5724 | - |
dc.identifier.url | http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=30344467260 | - |
dc.identifier.wosid | 000233093000074 | - |
dc.language | 영어 | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.title | Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media | - |
dc.type | Article | - |
dc.description.journalRegisteredClass | scopus | - |
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