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Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Author(s)
Whelan, Patrick R.Zhou, BinbinBezencenet, OdileShivayogimath, AbhayMishra, NeerajShen, QianJessen, Bjarke S.Pasternak, IwonaMackenzie, David M. A.Ji, JieSun, CunzhiSeneor, PierreDlubak, BrunoLuo, Birongosterberg, Frederik W.Huang, DepingShi, HaofeiLuo, DaWang, MeihuiRuoff, Rodney S.Conran, Ben R.McAleese, CliffordHuyghebaert, CedricBrems, StevenBooth, Timothy J.Napal, IlargiStrupinski, WlodekPetersen, Dirch H.Forti, StivenColetti, CamillaJouvray, AlexandreTeo, Kenneth B. K.Centeno, AlbaZurutuza, AmaiaLegagneux, PierreJepsen, Peter U.Boggild, Peter
Issued Date
2021-04
DOI
10.1088/2053-1583/abdbcb
URI
https://scholarworks.unist.ac.kr/handle/201301/55389
Fulltext
https://iopscience.iop.org/article/10.1088/2053-1583/abdbcb
Citation
2D MATERIALS, v.8, no.2, pp.022003
Abstract
Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
Publisher
IOP PUBLISHING LTD
ISSN
2053-1583
Keyword (Author)
terahertz spectroscopylarge-scale grapheneCVD grapheneelectrical mapping

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