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DC Field | Value | Language |
---|---|---|
dc.citation.endPage | 2181 | - |
dc.citation.number | 7 | - |
dc.citation.startPage | 2175 | - |
dc.citation.title | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.citation.volume | 6 | - |
dc.contributor.author | Chung, Jae-Hyun | - |
dc.contributor.author | Chen, Xinqi | - |
dc.contributor.author | Zimney, Eric J. | - |
dc.contributor.author | Ruoff, Rodney S. | - |
dc.date.accessioned | 2023-12-22T09:44:23Z | - |
dc.date.available | 2023-12-22T09:44:23Z | - |
dc.date.created | 2021-10-19 | - |
dc.date.issued | 2006-07 | - |
dc.description.abstract | Textured alumina films have been used to fabricate nanoscale pores in Si3N4 membranes. A few nanometer-thick alumina layer was used as a masking material for nanopore fabrication, and the pattern was transferred into a 100-nm thick, 200 mu m x 200 mu m Si3N4 membrane by reactive ion etching (RIE). The nanopores were found to be concentrated in a similar to 150-mu m diameter region at the center of the membrane. | - |
dc.identifier.bibliographicCitation | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.6, no.7, pp.2175 - 2181 | - |
dc.identifier.doi | 10.1166/jnn.2006.366 | - |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.scopusid | 2-s2.0-33750156183 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/54446 | - |
dc.identifier.url | https://www.ingentaconnect.com/content/asp/jnn/2006/00000006/00000007/art00045?token=006c1b0d213d420eba6266d6546592f653b672c57582a72612d58464340595c5f3b3b4741217676343e7b55796c7a3f1e55b77986a5d | - |
dc.identifier.wosid | 000239542900045 | - |
dc.language | 영어 | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.title | Fabrication of nanopores in a 100-nm thick Si3N4 membrane | - |
dc.type | Article | - |
dc.description.isOpenAccess | FALSE | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter | - |
dc.relation.journalResearchArea | Chemistry; Science & Technology - Other Topics; Materials Science; Physics | - |
dc.type.docType | Article | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordAuthor | nanopores | - |
dc.subject.keywordAuthor | reactive ion etching | - |
dc.subject.keywordAuthor | Si3N4 membrane | - |
dc.subject.keywordAuthor | alumina film | - |
dc.subject.keywordPlus | PHOTONIC BAND-GAP | - |
dc.subject.keywordPlus | NANOFABRICATION | - |
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