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Yoon, Tae-Sik
Nano Semiconductor Research Lab.
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The Formation of SiGe Nanocrystals and Control Gate Oxide Through the Oxidation of Thin Amorphous Si0.7Ge0.3 Layer and Its Electrical Properties

Author(s)
Yoon, Tae-Sik
Issued Date
2003-04-22
URI
https://scholarworks.unist.ac.kr/handle/201301/50716
Citation
2003 MRS Spring Meeting
Publisher
Materials Research Society

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