dc.citation.conferencePlace |
KO |
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dc.citation.conferencePlace |
Seoul |
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dc.citation.endPage |
676 |
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dc.citation.startPage |
675 |
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dc.citation.title |
10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010 |
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dc.contributor.author |
Kim, B.-J. |
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dc.contributor.author |
Kim, H.-J. |
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dc.contributor.author |
Jung, S.-M. |
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dc.contributor.author |
Yoon, Tae-Sik |
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dc.contributor.author |
Kim, Y.-S. |
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dc.contributor.author |
Lee, H.H. |
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dc.date.accessioned |
2023-12-20T03:36:10Z |
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dc.date.available |
2023-12-20T03:36:10Z |
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dc.date.created |
2021-03-15 |
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dc.date.issued |
2010-10-11 |
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dc.description.abstract |
Thin film transistors TFTs with nitrogen doped indium zinc tin oxide channel layer were fabricated and characterized. Heavily doped Si was used as a common gate electrode and PECVD Silicon nitride (SiNx) was used as a gete dielectric material for the TFT. Source and drain electrodes were deposited on the SiNx layer and IZTO:N layer was formed by spin-coating method. |
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dc.identifier.bibliographicCitation |
10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010, pp.675 - 676 |
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dc.identifier.issn |
1738-7558 |
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dc.identifier.scopusid |
2-s2.0-79959922611 |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/50671 |
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dc.language |
영어 |
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dc.publisher |
IMID/IDMC/ASIA Display 2010 |
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dc.title |
Effect of N doping on solution-processed indium zinc tin oxide thin film transistors |
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dc.type |
Conference Paper |
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dc.date.conferenceDate |
2010-10-11 |
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