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dc.citation.endPage 213 -
dc.citation.startPage 192 -
dc.citation.title MATERIALS TODAY -
dc.citation.volume 42 -
dc.contributor.author Sun, Haibin -
dc.contributor.author Dong, Jichen -
dc.contributor.author Liu, Fengning -
dc.contributor.author Ding, Feng -
dc.date.accessioned 2023-12-21T16:36:38Z -
dc.date.available 2023-12-21T16:36:38Z -
dc.date.created 2020-12-21 -
dc.date.issued 2021-01 -
dc.description.abstract Etching is one of the key steps in materials processing in the semiconducting industry and recent progress in this field has shown that etching can be used to create various structures of two-dimensional (2D) materials, and can be viewed as a complementary technique to growth. Besides, etching has many other applications in 2D materials synthesis, processing and characterization, such as helping to understand the growth mechanism in-depth, identifying point and line defects in a 2D material, improving the quality of 2D materials by combining the growth process, and for fabricating 2D heterojunctions. Here, we review the current progress on the etching of graphene and other 2D materials; the content of this review includes: (i) etching of single-crystalline 2D materials; (ii) etching of multilayer 2D materials; (iii) etching of polycrystalline 2D materials; (iv) experimental factors, such as partial pressure of etchants, etchant species, and substrate, that affect 2D materials etching; (v) applications of etching in graphene and other 2D materials synthesis, characterization and processing and (vi) the challenges and opportunities in 2D materials etching. -
dc.identifier.bibliographicCitation MATERIALS TODAY, v.42, pp.192 - 213 -
dc.identifier.doi 10.1016/j.mattod.2020.09.031 -
dc.identifier.issn 1369-7021 -
dc.identifier.scopusid 2-s2.0-85096382583 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/49017 -
dc.identifier.url https://www.sciencedirect.com/science/article/pii/S1369702120303345?via%3Dihub -
dc.identifier.wosid 000629282900026 -
dc.language 영어 -
dc.publisher ELSEVIER SCI LTD -
dc.title Etching of two-dimensional materials -
dc.type Article -
dc.description.isOpenAccess FALSE -
dc.relation.journalWebOfScienceCategory Materials Science, Multidisciplinary -
dc.relation.journalResearchArea Materials Science -
dc.type.docType Article -
dc.description.journalRegisteredClass scie -
dc.description.journalRegisteredClass scopus -
dc.subject.keywordAuthor Two-dimensional -
dc.subject.keywordAuthor Metallic nanocrystals -
dc.subject.keywordAuthor Renewable energy -
dc.subject.keywordAuthor Electrocatalysis -

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