2012 International Conference on Manufacturing Engineering and Technology for Manufacturing Growth, METMG 2012, v.628, pp.43 - 49
Abstract
A simpleand inexpensive top down approach to fabricate micropatterned carbon microand nano-fibers has been developed combiningCarbon-MEMS technology, Low Voltage Near-Field Electrospinning (LVNFES),and isotropic dry etching. A multitude of applications can take advantage of these patterned carbon nanofibers especially in the field of electrochemical sensors and nanoelectronics. In particular, wehave developed a novel polymeric ink that exhibits excellent electrospinning capability in a LVNFES setup and that does survive the pyrolysis process. To illustrate the potential of this new ink, we have fabricated carbon fiberssuspended on Carbon-MEMS structures. The fiber thickness can be controlled by adjusting the LVNFES voltage and using isotropic oxygen plasma based dry etching.
Publisher
2012 International Conference on Manufacturing Engineering and Technology for Manufacturing Growth, METMG 2012