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고효율 마그네트론 스퍼트링 캐소드의 설계 및 유연기판 박막 공정 특성

Author(s)
Park, Lee Soon
Issued Date
2009-04-10
URI
https://scholarworks.unist.ac.kr/handle/201301/43846
Citation
2009 춘계 고분자학회
Publisher
한국고분자학회

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