File Download

There are no files associated with this item.

  • Find it @ UNIST can give you direct access to the published full text of this article. (UNISTARs only)
Related Researcher

신흥주

Shin, Heungjoo
Micro/Nano Integrated Systems Lab.
Read More

Views & Downloads

Detailed Information

Cited time in webofscience Cited time in scopus
Metadata Downloads

Full metadata record

DC Field Value Language
dc.citation.conferencePlace KO -
dc.citation.conferencePlace 제주 -
dc.citation.title 제11회 한국 MEMS 학술대회 -
dc.contributor.author Shin, Heungjoo -
dc.contributor.author Kranz, C -
dc.contributor.author Hesketh, PJ -
dc.contributor.author Mizaikoff, B -
dc.date.accessioned 2023-12-20T04:09:36Z -
dc.date.available 2023-12-20T04:09:36Z -
dc.date.created 2013-07-17 -
dc.date.issued 2009-04-02 -
dc.identifier.bibliographicCitation 제11회 한국 MEMS 학술대회 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/43072 -
dc.language 한국어 -
dc.publisher 한국 MEMS 학술대회 운영위원회 -
dc.title 일괄공정을 이용한 SECM-AFM 캔틸레버 개발 -
dc.type Conference Paper -
dc.date.conferenceDate 2009-04-02 -

qrcode

Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.