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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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일괄공정을 이용한 SECM-AFM 캔틸레버 개발
- Author(s)
- Shin, Heungjoo, Kranz, C, Hesketh, PJ, Mizaikoff, B
- Issued Date
- 2009-04-02
- Citation
- 제11회 한국 MEMS 학술대회
- Publisher
- 한국 MEMS 학술대회 운영위원회
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