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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 대한기계학회 신뢰성부문 2016년도 춘계학술대회 | - |
| dc.contributor.author | 박주영 | - |
| dc.contributor.author | 신인선 | - |
| dc.contributor.author | 권대일 | - |
| dc.date.accessioned | 2023-12-19T20:42:11Z | - |
| dc.date.available | 2023-12-19T20:42:11Z | - |
| dc.date.created | 2016-10-17 | - |
| dc.date.issued | 2016-04-28 | - |
| dc.identifier.bibliographicCitation | 대한기계학회 신뢰성부문 2016년도 춘계학술대회 | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/41009 | - |
| dc.identifier.url | http://www.dbpia.co.kr/Journal/ArticleDetail/NODE06671766 | - |
| dc.language | 한국어 | - |
| dc.publisher | 대한기계학회 | - |
| dc.title.alternative | 반도체 제조장비 신뢰성 평가를 위한 모듈 가속시험설계 | - |
| dc.title | Development of Accelerated Life Test for Modules of Semiconductor Equipment | - |
| dc.type | Conference Paper | - |
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