dc.citation.conferencePlace |
US |
- |
dc.citation.title |
The 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
- |
dc.contributor.author |
Kim, So Youn |
- |
dc.date.accessioned |
2023-12-19T20:38:00Z |
- |
dc.date.available |
2023-12-19T20:38:00Z |
- |
dc.date.created |
2017-01-09 |
- |
dc.date.issued |
2016-06-02 |
- |
dc.identifier.bibliographicCitation |
The 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
- |
dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/40270 |
- |
dc.language |
영어 |
- |
dc.publisher |
Electron, Ion, and Photon Beam Technology and Nanofabrication |
- |
dc.title |
Block Copolymer Nanolithography |
- |
dc.type |
Conference Paper |
- |
dc.date.conferenceDate |
2016-05-31 |
- |