dc.citation.conferencePlace |
CC |
- |
dc.citation.conferencePlace |
중국 |
- |
dc.citation.title |
International Symposium on Microscopy and Microanalysis of Materials 2016 |
- |
dc.contributor.author |
Kim, Kangsik |
- |
dc.contributor.author |
Oh, Il Kwon |
- |
dc.contributor.author |
Kim, Hyungjun |
- |
dc.contributor.author |
Lee, Zonghoon |
- |
dc.date.accessioned |
2023-12-19T20:08:55Z |
- |
dc.date.available |
2023-12-19T20:08:55Z |
- |
dc.date.created |
2017-01-10 |
- |
dc.date.issued |
2016-09-23 |
- |
dc.identifier.bibliographicCitation |
International Symposium on Microscopy and Microanalysis of Materials 2016 |
- |
dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/40217 |
- |
dc.language |
영어 |
- |
dc.publisher |
International Symposium on Microscopy and Microanalysis of Materials |
- |
dc.title |
TEM Analysis of Plasma Induced Damages in Plasma Enhanced Atomic Layer Deposition |
- |
dc.type |
Conference Paper |
- |
dc.date.conferenceDate |
2016-09-23 |
- |